Plasma processor hi plasma processing atana hman thin a ni. A structure chu a hnuaia thil pawimawh ber berte atanga siam a ni:
Discharge Chamber: Discharge chamber hi plasma processor-a thil pawimawh ber a ni. AC voltage sang tak emaw radio frequency electric field hmangin gas a chhuak a, chu chuan plasma a siam a ni. Discharge chamber hi a tlangpuiin insulating materials ceramic emaw glass emaw hmanga siam a ni.
Working Chamber: Working Chamber hi material processing na hmun pawimawh ber a ni. Gas, pressure leh power parameter hrang hrang control hmangin processing effect hrang hrang a awm a. Working chamber hi a tlangpuiin vacuum sealing property tha tak, metal emaw ceramic emaw hmanga siam a ni.
Evacuation System: Vacuum system hmang hian working chamber atanga gas chu lakchhuah a ni a, processing laiin vacuum environment siam a ni. Vacuum system hi a tlangpuiin vacuum pump leh a kaihhnawih control system atanga siam a ni.
High-frequency power supply: High-frequency power supply hian plasma processor hnenah energy a pe a, high-frequency electric field hmanga plasma siam turin gas chu ionize a ni. High-frequency power supply hi a tlangpuiin electronic component leh a kaihhnawih control system atanga siam a ni.
Automatic control system: Automatic control system hian plasma processing process zawng zawng a control a, parameter setting, processing time control, leh vacuum level monitoring te pawh a huam tel a ni. Automatic control system hi a tlangpuiin computer leh a kaihhnawih control software a ni.
Tin, plasma processor-ah hian discharge chamber-a gas mamawh supply turin gas supply system dah a ni bawk. He system hi a tlangpuiin gas cylinder, pressure regulator, flow controller leh component dangte a awm thin.
A tawi zawngin, plasma processor structure-ah hian discharge chamber, working chamber, vacuum system, high-frequency power supply, leh automatic control system te a awm a ni. Heng components te hi coordinated operation hmangin plasma processor chuan material surface ah physical leh chemical reaction hrang hrang a thlen thei a, chu chuan a duh ang enkawlna a thlen thei a ni.